Patent US 4331476A
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| Patent number | US 4331476A |
|---|---|
| Title | Sputtering targets with low mobile ion contamination |
| Inventors | Earl R. Helderman, Robert R. Zimmerman |
| Company | Tektronix Inc |
| Filing date | 1980-01-31 |
| Grant date | 1982-05-25 |
| Cites |