Patent US 4606113A
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| Patent number | US 4606113A |
|---|---|
| Title | Method of manufacturing metal-semiconductor field effect transistors using orientation dependent etched recesses of different depths |
| Inventors | Ajit G. Rode |
| Company | Triquint Semiconductor, Inc. |
| Filing date | 1985-03-25 |
| Grant date | 1986-08-19 |
| Cites |